X-RAY DIFFRACTION STUDY OF IMPERFECTIONS IN EPITAXIAL SILICON ON SAPPHIRE

被引：1
|
作者：
ZEYFANG, R
机构：
来源：
THIN SOLID FILMS | 1970年 / 6卷 / 05期
关键词：
D O I：
10.1016/0040-6090(70)90082-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：321 / &
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