We have developed a unique substrate terracing process to achieve two-dimensional arrays of high-T-c step-edge superconductor-normal metal-superconductor Josephson junctions. This process has been used to realize 3x3 and 3x6 antenna coupled arrays for direct detection of emission. An enhancement to this process incorporating a YBa2Cu3O7-delta base layer and a Nb/PdAu ground plane is described. This modification enabled the fabrication of arrays capacitively coupled to detector junctions for detection of emission at frequencies beyond 300 GHz. This report details the motivation, design, fabrication process, and preliminary results of several array experiments.
NUOVO CIMENTO DELLA SOCIETA ITALIANA DI FISICA D-CONDENSED MATTER ATOMIC MOLECULAR AND CHEMICAL PHYSICS FLUIDS PLASMAS BIOPHYSICS,
1994,
16
(12):
: 2095
-
2102