SI+ ION-BEAM MIXING OF TIN LAYERS ON CRYSTALLINE SILICON

被引：4
|
作者：
MASSOURAS, G
ROGER, JA
ROMANA, L
FUCHS, G
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 36卷 / 02期
关键词：
D O I：
10.1016/0168-583X(89)90576-4
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：148 / 152
页数：5
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