THIN-FILM MOSFETS FABRICATED IN LASER-ANNEALED POLYCRYSTALLINE SILICON

被引：102
|
作者：
LEE, KF [1 ]
GIBBONS, JF [1 ]
SARASWAT, KC [1 ]
机构：
[1] HEWLETT PACKARD CO,LABS,PALO ALTO,CA 94304
来源：
APPLIED PHYSICS LETTERS | 1979年 / 35卷 / 02期
关键词：
D O I：
10.1063/1.91025
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：173 / 175
页数：3
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