SPUTTERING AND TECHNOLOGY OF ION EROSION

被引：0
|
作者：
DIEUMEGARD, D
机构：
来源：
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS | 1980年 / 35卷 / 204期
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D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
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页码：317 / 336
页数：20
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