A COMPARISON OF THIN-FILM MEASUREMENT BY GUIDED-WAVES, ELLIPSOMETRY AND REFLECTOMETRY

被引：28

|

作者：

KING, RJ

TALIM, SP

机构：

来源：

OPTICA ACTA | 1981年 / 28卷 / 08期

关键词：

D O I：

10.1080/713820674

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：1107 / 1123

页数：17

相关论文

共 50 条

[1] NONLINEAR THIN-FILM GUIDED-WAVES IN NON-KERR MEDIA
STEGEMAN, GI
ARIYASU, J
SEATON, CT
SHEN, TP
MOLONEY, JV
APPLIED PHYSICS LETTERS, 1985, 47 (12) : 1254 - 1256
[2] USE OF A CONCENTRIC-ARC GRATING AS A THIN-FILM SPECTROGRAPH FOR GUIDED-WAVES
TIEN, PK
CAPIK, RJ
APPLIED PHYSICS LETTERS, 1980, 37 (06) : 524 - 526
[3] EXACT SOLUTION FOR NONLINEAR THIN-FILM GUIDED-WAVES IN HIGHER-ORDER NONLINEAR MEDIA
MIHALACHE, D
MAZILU, D
BERTOLOTTI, M
SIBILIA, C
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1988, 5 (02) : 565 - 570
[4] STABILITY OF BLACK, GRAY, AND BRIGHT NONLINEAR GUIDED-WAVES IN A THIN-FILM BOUNDED BY A SELF-DEFOCUSING MEDIUM
CHEN, YJ
ATAI, J
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1995, 31 (12) : 2093 - 2100
[5] ELLIPSOMETRY IN THIN-FILM ANALYSIS
THEETEN, JB
ASPNES, DE
ANNUAL REVIEW OF MATERIALS SCIENCE, 1981, 11 : 97 - 122
[6] OPTICAL CHARACTERIZATION OF THIN-FILMS BY GUIDED-WAVES
PELLETIER, E
FLORY, F
HU, Y
APPLIED OPTICS, 1989, 28 (14) : 2918 - 2924
[7] THIN-FILM BEAM SPLITTER AND REFLECTOR FOR OPTICAL GUIDED WAVES
TSANG, WT
WANG, S
APPLIED PHYSICS LETTERS, 1975, 27 (11) : 588 - 590
[8] Novel DUV photoresist modeling by optical thin-film decomposition from spectral ellipsometry/reflectometry data
Niu, XH
Jakatdar, N
Spanos, C
FLATNESS, ROUGHNESS, AND DISCRETE DEFECTS CHARACTERIZATION FOR COMPUTER DISKS, WAFERS, AND FLAT PANEL DISPLAYS II, 1998, 3275 : 172 - 179
[9] USE OF GUIDED-WAVES IN THE OPTIC CHARACTERIZATION OF THIN-LAYERS
OLIVIER, M
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1984, 39 (224): : 461 - 462
[10] Innovations in ellipsometry facilitate thin-film analysis
Teboul, Eric
LASER FOCUS WORLD, 2008, 44 (11): : 76 - 79

← 1 2 3 4 5 →