SURFACE-ACOUSTIC-WAVE TRANSDUCER IN A LAYERED STRUCTURE COMPOSED OF THIN PIEZOELECTRIC CERAMIC PLATE AND GLASS

被引:3
|
作者
TODA, K
YAMAMOTO, Y
机构
[1] Department of Electronic Engineering, National Defense Academy, Hashirimizu, Yokosuka
关键词
SURFACE ACOUSTIC WAVE DEVICE; INTERDIGITAL TRANSDUCER; ELECTROMECHANICAL COUPLING FACTOR;
D O I
10.1143/JJAP.32.4230
中图分类号
O59 [应用物理学];
学科分类号
摘要
Operation performance of a surface acoustic wave (SAW) interdigital transducer (IDT) in a layered structure composed of a thin piezoelectric ceramic plate and a glass substrate is described in terms of phase velocity, electromechanical coupling constant and mechanical displacement distributions. The numerical results of SAW phase velocities in the form of a function of the product of frequency and thickness of the piezoelectric ceramic plate are in good agreement with the measured velocities of the constructed layer-structured devices. The first-order SAW mode device has an excellent electromechanical coupling constant of greater than 15%, which is favorable for a SAW device exhibiting a satisfactory performance under single-mode operation in a SAW oscillator construction.
引用
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页码:4230 / 4232
页数:3
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