LASER-BEAM DEFLECTION MONITORING OF ND-YAG LASER ABLATION - PULSE SHAPE AND REPETITION RATE EFFECTS

被引:3
|
作者
DIACI, J
MOZINA, J
机构
[1] Faculty of Mechanical Engineering, University of Ljubljana, 61000 Ljubljana
关键词
D O I
10.1016/0169-4332(93)90526-H
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The laser beam deflection probe has been employed to study blast waves generated during ablation of metallic surfaces by sequences of 1.06 mum Nd : YAG laser pulses separated by less than 1 mus. A fluence threshold has been found, below which the effects of individual pulses can be resolved by the laser probe. Above that, the deflection signal has a similar form as if the surface were irradiated with a single pulse. Analysis of the signals in terms of the spherical blast wave theory shows that a pulse sequence generates a weaker blast wave than a single pulse of equal total energy. On the other hand, the sequence yields a higher etch depth than the single pulse.
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页码:321 / 325
页数:5
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