Noise removal from Auger images by using adaptive binomial filter

The application of the new smoothing routine based on adaptive binomial filter for Scanning Auger Microscopy has been investigated. The main advantage of the adaptive binomial filter is the possibility to reduce the noise without noticeable signal broadening. Experimental Auger images of the various samples (Au films on alumina and porous silicon films) were processed by this routine. It was demonstrated that the employment of the new smoothing routine improves the visual quality of chemical images acid elemental scattering diagrams. The detailed surface chemical composition of the samples investigated was finally revealed by using elemental scattering diagram analysis.