PLASMA-SHEATH BOUNDARY IN PLASMAS CONTAINING THERMAL AND BEAM ELECTRONS

被引：22

作者：

BRADLEY, JW ^{[1
]}

AMEMIYA, H ^{[1
]}

机构：

[1] INST PHYS & CHEM RES,WAKO,SAITAMA 35101,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 6A期

关键词：

PLASMA-SHEATH BOUNDARY; BOHM CRITERIA; BEAM ELECTRONS; FLOATING POTENTIAL; DISPERSION RELATION;

D O I：

10.1143/JJAP.33.3578

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The behaviour of the plasma-sheath boundary in the presence of beam electrons with finite temperature is modelled assuming a criterion for sheath formation. Solutions for the sheath edge potential are found from two separate treatments; a charge balance model and a dispersion relation description of the plasma. Ion saturation currents and floating potentials are determined as a function of the beam-plasma parameters. The results of this investigation can be used to predict the plasma properties at the surface of a substrate in process plasma discharges containing thermal electron beams.

引用

页码：3578 / 3585

页数：8

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