CHARACTERIZATION OF YBA2CU3O7-X THIN-FILMS DEPOSITED BY HIGH-PRESSURE OXYGEN SPUTTERING

被引：2
|
作者：
MURALIDHAR, GK
RAO, GM
MOHAN, S
KULKARNI, VN
BALASUBRAMANIAN, TV
机构：
[1] INDIAN INST TECHNOL,DEPT PHYS,KANPUR 208016,UTTAR PRADESH,INDIA
[2] DEF MET RES LAB,HYDERABAD 500258,INDIA
来源：
SOLID STATE COMMUNICATIONS | 1994年 / 89卷 / 08期
关键词：
D O I：
10.1016/0038-1098(94)90583-5
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
Superconducting YBa2Cu3O7 thin films have been deposited by high pressure oxygen sputtering technique (HOST). The epitaxial films prepared on MgO substrates have been analysed using Rutherford Backscattering Spectroscopy (RBS) and Auger Electron Spectroscopy (AES). The films are found to be stoichiometric and homogeneous. Thickness uniformity and surface roughness of these films have also been analysed. The possible sputter mechanism in this method has been discussed.
引用
收藏
页码：713 / 717
页数：5
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