IONIC SPECIES RESPONSIBLE FOR THE PLASMA ANODIZATION OF SILICON

被引：18

作者：

BARLOW, KJ ^{[1
]}

KIERMASZ, A ^{[1
]}

ECCLESTON, W ^{[1
]}

MORUZZI, JL ^{[1
]}

机构：

[1] UNIV LIVERPOOL,DEPT ELECT ENGN & ELECTR,LIVERPOOL L69 3BX,ENGLAND

来源：

APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 01期

关键词：

D O I：

10.1063/1.100571

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：57 / 59

页数：3

共 50 条

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