SPECTROSCOPIC ELLIPSOMETRIC INVESTIGATION OF MULTILAYERED AND SOLID-STATE AMORPHIZED CO/ZR FILMS

Spectroscopic ellipsometry is applied to analyse multilayered crystalline Co/Zr films as well as solid‐state amorphized films (SSA). The optical conductivity of multilayered Co/Zr films is shown to carry characteristic features of each component and may be described by a simple effective medium approximation. A comparison of the optical conductivity spectra σ(ω) for solid‐state amorphized and sputtered amorphous films is presented along with theoretically calculated σ(ω) for the crystalline CoZr alloy. The structureless optical spectrum of the SSA 12.5/25 Co/Zr film (composition modulation wavelength λ = 37.5 nm) is similar to those of the sputtered amorphous Co1−x‐Zrx (x = 0.42, 0.52) films while the spectrum of the SSA 25/50 Co/Zr film (λ = 75 nm) behaves likewise the spectrum of the c‐CoZr alloy. Differences in the local order of the solid‐state amorphized films are discussed on the basis of results of the optical measurements. Copyright © 1990 WILEY‐VCH Verlag GmbH & Co. KGaA