ULTRASONIC SURFACE-WAVES FOR STUDYING THE PROPERTIES OF THIN-FILMS

被引：1
|
作者：
KUCHLER, R
RICHTER, E
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1994年 / 146卷 / 02期
关键词：
D O I：
10.1002/pssa.2211460211
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The change of the spreading velocity of ultrasonic surface waves by thin film deposition is described by an approximation of the nonlinear equations of motion. The effect of residual stress in deposited films on the spreading Velocity is considered. As an example for practical applications, the Velocity change of surface waves after TiN film deposition on steel bars is investigated.
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页码：659 / 667
页数：9
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