RF-SPUTTERED B-DOPED A-SI-H AND A-SI-B-H ALLOYS

被引：14

作者：

JOUSSE, D ^{[1
]}

BUSTARRET, E ^{[1
]}

DENEUVILLE, A ^{[1
]}

STOQUERT, JP ^{[1
]}

机构：

[1] CTR RECH NUCL,PHASE LAB,F-67037 STRASBOURG,FRANCE

来源：

PHYSICAL REVIEW B | 1986年 / 34卷 / 10期

关键词：

D O I：

10.1103/PhysRevB.34.7031

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：7031 / 7044

页数：14

共 50 条

[1] ATOM PROBE ANALYSIS OF RF-SPUTTERED A-SI-H FILMS
KRISHNASWAMY, SV
MESSIER, R
WU, CS
MCLANE, SB
TSONG, TT
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02): : 309 - 312
[2] EFFECT OF OXYGEN INCORPORATION ON PROPERTIES OF RF-SPUTTERED A-SI-H FILMS
JIRANAPAKUL, K
SHIRAFUJI, J
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1986, 81 (1-2) : 29 - 40
[3] ANOMALOUS OPTICAL AND STRUCTURAL-PROPERTIES OF B-DOPED A-SI-H
YAMASAKI, S
MATSUDA, A
TANAKA, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (12): : L789 - L791
[4] HALL-EFFECT AND HOLE TRANSPORT IN B-DOPED A-SI-H
DRESNER, J
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 58 (2-3) : 353 - 357
[5] TRANSPORT IN DOPED SPUTTERED A-SI-H
ANDERSON, DA
[J]. BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1978, 23 (03): : 249 - 249
[6] EVIDENCE FOR STRUCTURAL RELAXATION IN MEASUREMENTS OF HYDROGEN DIFFUSION IN RF-SPUTTERED BORON-DOPED A-SI-H
MITRA, S
SHINAR, R
SHINAR, J
[J]. PHYSICAL REVIEW B, 1990, 42 (10): : 6746 - 6749
[7] BORON AND HYDROGEN-BONDING IN B-DOPED A-SI-H - AN NMR-STUDY
GREENBAUM, SG
CARLOS, WE
TAYLOR, PC
[J]. PHYSICA B & C, 1983, 117 (MAR): : 886 - 888
[8] BORON-DIFFUSION IN DEVICE-LIKE B-DOPED A-SIC-H/A-SI-H HETEROJUNCTION
ZHANG, FQ
HE, DY
SONG, ZZ
CHEN, GG
[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1990, 118 (01): : K17 - K20
[9] ESR STUDY OF B-DOPED A-SI-H(B) THIN-FILMS PREPARED BY REACTIVE-SPUTTERING
CHEN, GH
XU, JZ
ZHANG, FQ
[J]. CHINESE PHYSICS, 1991, 11 (03): : 712 - 715
[10] THE ESR STUDIES OF B-DOPED A-SI-H THIN-FILMS PREPARED BY REACTIVE SPUTTERING
CHEN, GG
XU, JZ
ZHANG, FQ
[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1990, 121 (02): : 501 - 505

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