SIMULTANEOUS RHEED-AES STUDY OF SI FILM GROWTH ON SI(111) AND SAPPHIRE (1102) SURFACES

被引:5
|
作者
NARUSAWA, T
SHIMIZU, S
KOMIYA, S
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D O I
10.1016/0039-6028(79)90436-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:572 / 580
页数:9
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