MORPHOLOGY AND ELECTRICAL-PROPERTIES OF IN DOPED CDS THIN-FILMS

被引：7
|
作者：
DHERE, NG [1 ]
MOUTINHO, HR [1 ]
DHERE, RG [1 ]
机构：
[1] INST MIL ENGENHARIA,CPQM,BR-22290 RIO DE JANEIRO,RJ,BRAZIL
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词：
D O I：
10.1116/1.574890
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1956 / 1959
页数：4
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