SPUTTER DEPOSITION OF THIN-FILMS

被引：0
|
作者：
JORGENSON, G
机构：
来源：
ELECTRO-OPTICAL SYSTEMS DESIGN | 1981年 / 13卷 / 11期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：11 / &
相关论文
共 50 条
  • [1] SPUTTER DEPOSITION OF BISRCACUO THIN-FILMS
    FUKUTOMI, M
    MACHIDA, J
    TANAKA, Y
    ASANO, T
    MAEDA, H
    HOSHINO, K
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1988, 27 (04): : L632 - L633
  • [2] SPUTTER DEPOSITION OF THIN-FILMS OF SUPERCONDUCTING ER(RHB)
    CHRISTNER, GL
    BRADFORD, B
    TOTH, LE
    CANTOR, R
    DAHLBERG, ED
    GOLDMAN, AM
    HUANG, CY
    [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (09) : 5820 - 5822
  • [3] SPUTTER-DEPOSITION OF YBACUO THIN-FILMS - PROBLEMS AND PROSPECTS
    MOHAN, S
    MURALIDHAR, GK
    [J]. METALS MATERIALS AND PROCESSES, 1994, 5 (04): : 233 - 246
  • [4] RF-SPUTTER DEPOSITION OF BORON-NITRIDE THIN-FILMS
    KIKKAWA, S
    TAKAHASHI, M
    GU, XY
    KANAMARU, F
    KATAYAMA, S
    KOIZUMI, M
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 : 341 - 343
  • [5] THE SPUTTER-DEPOSITION OF CERIUM OXIDE THIN-FILMS FOR SUPERCONDUCTION ELECTRONICS
    OWENS, JM
    TARTE, EJ
    BERGHUIS, P
    SOMEKH, RE
    [J]. IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 1995, 5 (02) : 1657 - 1660
  • [6] REOXIDATION OF SILICON SUBSTRATES DURING THE SPUTTER DEPOSITION OF OXIDIC THIN-FILMS
    BEHNER, H
    [J]. SOLID STATE COMMUNICATIONS, 1992, 83 (09) : 685 - 688
  • [7] ION-BEAM SPUTTER DEPOSITION OF LAYERED MAGNETIC THIN-FILMS
    SMITS, JW
    ALGRA, HA
    ENZ, U
    VANSTAPELE, RP
    [J]. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1983, 35 (1-3) : 89 - 92
  • [8] REACTIVE SPUTTER-DEPOSITION OF CRYSTALLINE CR/C/F THIN-FILMS
    OKEEFE, MJ
    RIGSBEE, JM
    [J]. MATERIALS LETTERS, 1994, 18 (5-6) : 251 - 256
  • [9] SPUTTER DEPOSITION OF EUO THIN FILMS
    COBURN, JW
    LEE, K
    [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (13) : 5903 - &
  • [10] The sputter deposition of oxide thin films
    Owens, JM
    Somekh, RE
    [J]. APPLIED SUPERCONDUCTIVITY 1995, VOLS. 1 AND 2: VOL 1: PLENARY TALKS AND HIGH CURRENT APPLICATIONS; VOL 2: SMALL SCALE APPLICATIONS, 1995, 148 : 819 - 822
12345