DESIGN OF AN ULTRAHIGH-VACUUM DIRECT-DRIVE, CRYOGENIC SAMPLE MANIPULATOR PROVIDING 2-DEGREES OF ROTATIONAL FREEDOM

被引：0
|
作者：
BRAUN, RM
WINOGRAD, N
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 05期
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D O I：
10.1116/1.578659
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
An ultrahigh vacuum direct-drive, cryogenic sample manipulator is described. It is fully bakeable in UHV, uses no lubricants, and does not require differentially pumped seals. It provides independent polar and azimuthal rotation of a sample, three degrees of translational freedom, electron-beam heating, as well as cooling to 100 K using liquid nitrogen.
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页码：2867 / 2870
页数：4
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