ION ENHANCED GAS-SURFACE REACTIONS - A KINETIC-MODEL FOR THE ETCHING MECHANISM

被引：93
|
作者：
GERLACHMEYER, U [1 ]
机构：
[1] MAX PLANCK INST STROMUNGSFORSCH,D-3400 GOTTINGEN,FED REP GER
来源：
SURFACE SCIENCE | 1981年 / 103卷 / 2-3期
关键词：
D O I：
10.1016/0039-6028(81)90282-X
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：524 / 534
页数：11
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