KINETICS OF EPITAXIAL-GROWTH OF GAN USING GA, HCL AND NH3

被引:45
|
作者
SHINTANI, A [1 ]
MINAGAWA, S [1 ]
机构
[1] HITACHI LTD,CENT RES LAB,KOKUBUNJI 185,TOKYO,JAPAN
关键词
D O I
10.1016/0022-0248(74)90050-5
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
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页码:1 / 5
页数:5
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