MONTE-CARLO STUDIES OF SPUTTERING

被引:30
|
作者
HAGGMARK, LG
WILSON, WD
机构
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D O I
10.1016/0022-3115(78)90128-9
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:149 / 155
页数:7
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