HIGH-QUALITY AL2O3 THIN-FILMS PREPARED BY A NOVEL 2-STEP EVAPORATION PROCESS

被引：9
|
作者：
SARAIE, J
GOTO, S
KITAO, Y
YODOGAWA, Y
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 11期
关键词：
D O I：
10.1149/1.2100292
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：2805 / 2809
页数：5
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