LIQUID SENSOR USING 2-PORT SURFACE ACOUSTIC-WAVE RESONATOR

被引：4

作者：

NOMURA, T ^{[1
]}

YASUDA, T ^{[1
]}

FURUKAWA, S ^{[1
]}

机构：

[1] KYUSHU INST TECHNOL,DEPT COMP SCI & ELECTR,IIZUKA,FUKUOKA 820,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷

关键词：

SH TYPE SAW; SAW RESONATOR; RESONANCE FREQUENCY; Q-VALUE; VISCOSITY SENSOR;

D O I：

10.7567/JJAPS.31S1.78

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A two-port SAW resonator has been designed for a stabilizing element of an SAW liquid sensor. There is increasing use of SAWs for sensors, and most of the works reported on sensors to date are concerning delay lines. In this paper, SAW resonators have been studied in order to reduce an acoustic loss and a distortion of the delay lines. SH type SAWs are excited on a 36-degrees YX LiTaO3 substrate by using IDTs. The two port SH-SAW resonators have been used for sensing the liquid. The sensitivity of the SAW resonance frequency and Q value for the viscosity of liquids have been measured.

引用

页码：78 / 81

页数：4

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