AZIMUTHAL ALIGNMENTS IN ELLIPSOMETRY - A HIGH-PRECISION METHOD USING A POLARIZATION MODULATOR

被引：4
|
作者：
MONIN, J
SAHSAH, H
SIBLINI, A
BREVETPHILIBERT, O
机构：
[1] Laboratoire de Recherche sur les Capteurs à Colloides et l'Instrumentation, Université Jean Monnet, Saint-Etienne, Cedex 2, 42023
来源：
APPLIED OPTICS | 1994年 / 33卷 / 07期
关键词：
D O I：
10.1364/AO.33.001213
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
An original (to the best of our knowledge) method to achieve azimuthal alignments of all polarizing components in ellipsometry is presented. It is an accurate nulling method, and it is easy to implement and can be used with any isotropic reflecting layer. It also allows one to check the eventual presence of surface anisotropy. The ferrofluid modulator used in this setup is briefly described. Measurements made for three reflecting surfaces (fused silica, silicon, and germanium) are presented.
引用
收藏
页码：1213 / 1217
页数：5
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