TEXTURE FORMATION IN POLYCRYSTALLINE DIAMOND VAPOR GROWTH UNDER THE INFLUENCE OF A PULSED SUPERSONIC BEAM

被引：7
|
作者：
SPRANG, H
BUSMANN, HG
LAUER, S
HERTEL, IV
机构：
[1] Freiburger Materialforschungszentrum (FMF) der Universität, Freiburg, W-7800, Stefan-Meier-Strasse
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1992年 / 55卷 / 04期
关键词：
D O I：
10.1007/BF00324083
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Polycrystalline diamond film deposition is studied under the influence of a pulsed supersonic beam. The beam is formed by a high-pressure valve which is used as gas inlet in an otherwise conventional hot-filament reactor. The growth rate of the films as well as the typical size of the micro-crystallites are independent of the stagnation pressure behind the nozzle of the valve as long as the background pressure and the gas flow through the chamber are kept constant. In contrast, a drastic change in texture formation is found.
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页码：347 / 351
页数：5
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