AN APPARATUS FOR BATCH FABRICATION OF MICROMECHANICAL ELEMENTS BY ION-BEAM MACHINING

被引：1
|
作者：
DAVIES, ST
BOWEN, DK
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期
关键词：
D O I：
10.1116/1.583897
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：337 / 341
页数：5
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