CHEMICAL ETCHING OF (100) GAAS IN THE (NH4)2CR2O7-H2SO4-NH4CL-H2O SYSTEM

被引：2
|
作者：
BARYCKA, I
ZUBEL, I
机构：
来源：
JOURNAL OF MATERIALS SCIENCE | 1986年 / 21卷 / 06期
关键词：
D O I：
10.1007/BF00547963
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：2153 / 2158
页数：6
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