MOS DEVICES FABRICATED BY ELECTRON-BEAM LITHOGRAPHY

被引：0
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作者：
YU, HN
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来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1980年 / 19卷
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D O I：
10.7567/JJAPS.19S1.13
中图分类号：
O59 [应用物理学];
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页码：13 / 14
页数：2
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