SIMULTANEOUS MEASURING METHOD OF TABLE MOTION ERRORS IN 6 DEGREES OF FREEDOM

被引:0
|
作者
SHIMIZU, S
LEE, HS
IMAI, N
机构
关键词
TABLE ATTITUDE; LASER MEASUREMENT; 3-DIMENSIONAL ERROR;
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中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
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页码:273 / 274
页数:2
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