FLUID SIMULATIONS OF RADIO-FREQUENCY GLOW-DISCHARGES - 2-DIMENSIONAL ARGON DISCHARGE INCLUDING METASTABLES

被引：41
|
作者：
LYMBEROPOULOS, DP [1 ]
ECONOMOU, DJ [1 ]
机构：
[1] UNIV HOUSTON,DEPT CHEM ENGN,PLASMA PROC LAB,HOUSTON,TX 77204
来源：
APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 18期
关键词：
D O I：
10.1063/1.110454
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Two-dimensional self-consistent fluid simulations of a 13.56 MHz argon glow discharge including metastable species were performed as examples of a coupled glow-discharge/neutral-transport-and-reaction system. The electron density was found to peak in the radial direction. The metastable density profiles showed ''hot spots'' in both axial and radial directions.
引用
收藏
页码：2478 / 2480
页数：3
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