PRESENT STATUS AND FUTURE PLAN OF SOFT-X-RAY MICROSCOPY AT THE PHOTON FACTORY

被引：5
|
作者：
KAGOSHIMA, Y [1 ]
MIYAHARA, T [1 ]
ANDO, M [1 ]
AOKI, S [1 ]
机构：
[1] UNIV TSUKUBA,INST APPL PHYS,TSUKUBA,IBARAKI 305,JAPAN
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 01期
关键词：
D O I：
10.1063/1.1142666
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
At the Photon Factory a project of a transmission soft x-ray microscope using zone plates as imaging elements has been initiated since 1986 at the beam line BL2B which is for the linearly polarized undulator radiation. The prototype version was built and its performance was measured in 1987. In order to proceed with our project we have reconstructed it capable of the spatial resolution better than 100 nm. Further, we have just started a new plan of microscopy at the station BL28 which introduces the circularly polarized soft x-ray/vacuum ultraviolet light emitted from a helical undulator. Both the present status at BL2B and a future plan at BL28 are described.
引用
收藏
页码：605 / 608
页数：4
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