LASER DEPOSITION OF EPITAXIAL TITANIUM NITRIDE FILMS ON (100) MGO

被引：27
|
作者：
BIUNNO, N [1 ]
NARAYAN, J [1 ]
SRIVATSA, AR [1 ]
HOLLAND, OW [1 ]
机构：
[1] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831
来源：
APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 04期
关键词：
D O I：
10.1063/1.101881
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：405 / 407
页数：3
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