DAMAGE PROFILE ON HIGH-ENERGY ION-IMPLANTED GAP

被引：8
|
作者：
ASCHERON, C [1 ]
OTTO, G [1 ]
FLAGMEYER, R [1 ]
ZSCHAU, HE [1 ]
BUGROV, VN [1 ]
KARAMYAN, SA [1 ]
机构：
[1] DUBNA JOINT NUCL RES INST,DUBNA,USSR
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1986年 / 97卷 / 01期
关键词：
D O I：
10.1002/pssa.2210970137
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：K15 / K19
页数：5
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