VICKERS HARDNESS MEASUREMENT OF ION-IMPLANTED MGO

被引：4
|
作者：
AOKI, Y
RUCK, DM
VOGT, D
LEIBLE, K
KHUBEIS, I
MEYER, O
机构：
[1] UNILAC,GSI,MAT FORSCH,W-6100 DARMSTADT,GERMANY
[2] INFP,KFK,W-7500 KARLSRUHE 1,GERMANY
[3] UNIV JORDAN,AMMAN,JORDAN
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 91卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(94)96225-1
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The Vickers hardness was measured for single crystals of MgO(100) implanted with 130 keV or 1.8 MeV Ar+ ions and with 400 keV Xe2+ ions by means of the indentation technique with an applied load of 0.4-30 mN. Implantation with 130 keV Ar+ and 400 keV Xe2+ gave similar results in hardening of MgO surface layers. In addition, the dose dependence of the measured hardness curve showed that a softening mechanism takes place at high doses. High energy implantation (1.8 MeV Ar+) made a hardened surface layer on MgO. This hardened layer also became softer at high doses.
引用
收藏
页码：247 / 251
页数：5
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