SIMULTANEOUS THICKNESS AND GROUP INDEX MEASUREMENT USING OPTICAL LOW-COHERENCE REFLECTOMETRY

被引:106
|
作者
SORIN, WV
GRAY, DF
机构
[1] Hewlett-Packard Laboratories, Palo Alto
关键词
D O I
10.1109/68.124892
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Using high-resolution optical reflectometry, group index and physical thickness can both be determined by precisely measuring optical time delays through a sample. Optical low-coherence reflectometry offers both the high-spatial resolution and large dynamic range required to perform accurate measurements using this technique.
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页码:105 / 107
页数:3
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