EFFECT OF ION-BOMBARDMENT ON THE GROWTH AND PROPERTIES OF HYDROGENATED AMORPHOUS SILICON-GERMANIUM ALLOYS

被引：41
|
作者：
PERRIN, J [1 ]
TAKEDA, Y [1 ]
HIRANO, N [1 ]
MATSUURA, H [1 ]
MATSUDA, A [1 ]
机构：
[1] ELECTROTECH LAB,SAKURA,IBARAKI 305,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 01期
关键词：
D O I：
10.1143/JJAP.28.5
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：5 / 11
页数：7
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