EFFECT OF DEGREE OF IMIDIZATION IN POLYIMIDE THIN-FILMS PREPARED BY VAPOR-DEPOSITION POLYMERIZATION ON THE ELECTRICAL-CONDUCTION

被引：33

作者：

ITO, Y ^{[1
]}

HIKITA, M ^{[1
]}

KIMURA, T ^{[1
]}

MIZUTANI, T ^{[1
]}

机构：

[1] NAGOYA UNIV,FAC ENGN,DEPT SYNTHET CHEM,CHIKUSA KU,NAGOYA,AICHI 464,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1990年 / 29卷 / 06期

关键词：

Electrical conduction; Imidization; Ir spectra; Polyamic acid precursor; Polyimide thin film; Vapor deposition polymerization;

D O I：

10.1143/JJAP.29.1128

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Polyimide (PI) thin films of about 300 nm in thickness are fabricated by vapor deposition polymerization (VDP) from pyromellitic dianhydride (PMDA) and 4, 4'-diaminodiphenylether (DDE). The structure of the films obtained is analyzed by means of infrared absorption spectra (IR spectra) and X-ray diffraction. The IR spectra show that the films are changed into PI by curing through the precursor, polyamic acid (PAA). The relation between the imidization of the films and the electrical conduction is examined. The results show that as imidization caused by curing the films proceeds, the current is decreased. It is therefore suggested that the residual PAA in PI thin films affects the electrical conduction. An attempt is also made to apply a model of ionic hopping conduction to the electrical conduction data. © 1990 The Japan Society of Applied Physics.

引用

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页码：1128 / 1131

页数：4

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