共 50 条
- [3] LASER-CONTROLLED PLASMA-ETCHING JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02): : 506 - 507
- [6] Excimer laser assisted etching of AlGaAs and GaAs JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (06): : 2340 - 2343
- [7] Laser-controlled etching of (Al,Ga)As epitaxial layers ADVANCED LASER PROCESSING OF MATERIALS - FUNDAMENTALS AND APPLICATIONS, 1996, 397 : 491 - 496
- [8] Etching behavior of GaAs/AlGaAs multilayer structure during laser beam scanning Journal of Electronic Materials, 2000, 29 : 195 - 198