HIGH-RESOLUTION SEM OBSERVATION OF SEMICONDUCTOR DEVICE CROSS-SECTIONS

被引：10
|
作者：
MEIERAN, ES [1 ]
KAMINS, TI [1 ]
机构：
[1] FAIRCHILD CAMERA & INSTR CORP, RES & DEV LAB, PALO ALTO, CA 94304 USA
来源：
SOLID-STATE ELECTRONICS | 1973年 / 16卷 / 05期
关键词：
D O I：
10.1016/0038-1101(73)90153-6
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：545 / +
页数：1
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