HIGH-ENERGY NEUTRAL ATOMS IN THE SPUTTERING OF ZNO

被引：67
|
作者：
TOMINAGA, K
UESHIBA, N
SHINTANI, Y
TADA, O
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1981年 / 20卷 / 03期
关键词：
D O I：
10.1143/JJAP.20.519
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：519 / 526
页数：8
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