1ST MICROWAVE CHARACTERIZATION OF LP-MOCVD GROWN GALNP/GAAS SELF-ALIGNED HBT

被引:52
|
作者
DELAGE, SL
DIFORTEPOISSON, MA
BLANCK, H
BRYLINSKI, C
CHARTIER, E
COLLOT, P
机构
[1] Thomson-CSF/LCR, 91404 Orsay Cédex, Domaine de Corbeville
关键词
SEMICONDUCTOR DEVICES AND MATERIALS; BIPOLAR DEVICES; TRANSISTORS; MICROWAVE DEVICES;
D O I
10.1049/el:19910163
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The microwave characterisation of GaInP/GaAs HBTs is reported. The structures are grown by LP-MOCVD, and carbon base doping is used. The transistor design is basically multimesas and the devices are obtained using a combination of dry and wet etching. The current and power gain cutoff frequencies of these devices are, respectively, 30GHz and 45 GHz.
引用
收藏
页码:253 / 254
页数:2
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