CONDUCTION MECHANISM IN PLASMA-POLYMERIZED TETRAFLUOROETHYLENE FILMS

被引：52

作者：

HETZLER, U ^{[1
]}

KAY, E ^{[1
]}

机构：

[1] IBM CORP,RES LAB,SAN JOSE,CA 95193

来源：

JOURNAL OF APPLIED PHYSICS | 1978年 / 49卷 / 11期

关键词：

D O I：

10.1063/1.324485

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5617 / 5623

页数：7

共 50 条

[1] CONDUCTION MECHANISM IN PLASMA-POLYMERIZED TETRAMETHYLSILANE FILMS
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[J]. THIN SOLID FILMS, 1981, 78 (02) : 125 - 132
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[J]. APPLIED PHYSICS LETTERS, 1991, 59 (22) : 2817 - 2819
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[J]. BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1977, 22 (03): : 453 - 453
[4] DIELECTRIC-PROPERTIES OF PLASMA-POLYMERIZED TETRAFLUOROETHYLENE FILMS
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[7] Similarity of plasma-polymerized tetrafluoroethylene and fluoropolymer films deposited by rf sputtering of poly(tetrafluoroethylene)
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[8] ON THE MECHANISM OF ELECTRICAL-CONDUCTION IN PLASMA-POLYMERIZED THIOPHENE THIN-FILMS
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[9] MOLECULAR-DIFFUSION IN PLASMA-POLYMERIZED TETRAFLUOROETHYLENE
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