FORMATION OF CAVITY IN SILICON AND ITS DEFORMATION DURING HEAT-TREATMENT

被引：0

作者：

YOSHIHIRO, N ^{[1
]}

NATSUAKI, N ^{[1
]}

机构：

[1] HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO 185,JAPAN

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1990年 / 19卷 / 07期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：35 / 35

页数：1

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[1] EFFECT OF BORON AND PHOSPHORUS IMPURITIES ON THE FORMATION OF MICRODEFECTS DURING HEAT-TREATMENT OF SILICON
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[J]. INORGANIC MATERIALS, 1987, 23 (06) : 784 - 786
[2] FORMATION OF LACTULOSE DURING HEAT-TREATMENT OF MILK
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[J]. MILCHWISSENSCHAFT-MILK SCIENCE INTERNATIONAL, 1983, 38 (08): : 475 - 477
[3] FORMATION OF LYSINOALANINE DURING HEAT-TREATMENT OF MILK
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[J]. ZEITSCHRIFT FUR LEBENSMITTEL-UNTERSUCHUNG UND-FORSCHUNG, 1983, 176 (05): : 341 - 345
[4] INFLUENCE OF A PRELIMINARY HEAT-TREATMENT ON THE FORMATION OF THERMAL DONORS IN SILICON
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[J]. SOVIET PHYSICS SEMICONDUCTORS-USSR, 1987, 21 (07): : 767 - 769
[5] FORMATION OF POSITRON-SENSITIVE DEFECTS DURING HEAT-TREATMENT OF SILICON IN AN ATMOSPHERE CONTAINING CHLORINE
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[J]. SOVIET PHYSICS SEMICONDUCTORS-USSR, 1990, 24 (10): : 1112 - 1114
[6] HEAT-TREATMENT DEFORMATION OF ROLLED GEARS
ZAKHAROV, BV
BERSENEV.VN
[J]. RUSSIAN ENGINEERING JOURNAL-USSR, 1972, 52 (03): : 64 - &
[7] HEAT-TREATMENT DEFORMATION OF STEEL PRODUCTS
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[J]. MATERIALS SCIENCE AND TECHNOLOGY, 1985, 1 (10) : 883 - 892
[8] HEAT-TREATMENT REDUCES COMPONENT DEFORMATION
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[J]. RUSSIAN ENGINEERING JOURNAL-USSR, 1972, 52 (04): : 62 - &
[9] DEFORMATION-FREE HEAT-TREATMENT
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[J]. METAL SCIENCE AND HEAT TREATMENT, 1986, 28 (5-6) : 454 - 455
[10] Heat-treatment effects on porous silicon
[J]. 1600, American Inst of Physics, Woodbury, NY, USA (76):

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