CHARACTERIZATION OF REACTIVELY SPUTTERED TIN FILMS

被引：0
|
作者：
CIRCELLI, N [1 ]
HEMS, J [1 ]
机构：
[1] ELECTROTECH,DIF SPUTTERING,BRISTOL,ENGLAND
来源：
SOLID STATE TECHNOLOGY | 1988年 / 31卷 / 02期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：75 / 78
页数：4
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