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PREPARATION OF NIOBIUM NITRIDE FILMS BY CVD

被引：0
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作者：
FUNAKUBO, H
KIEDA, N
MIZUTANI, N
KATO, M
机构：
来源：
YOGYO-KYOKAI-SHI | 1987年 / 95卷 / 01期
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中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
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页码：55 / 58
页数：4
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