A STUDY OF THE OMVPE GROWTH MECHANISMS USING INTERNAL REFLECTANCE SPECTROSCOPY TO EXAMINE ADSORPTION OF TMGA AND NH3 AND SURFACE-REACTIONS BETWEEN THEM

被引：26
|
作者：
TRIPATHI, A [1 ]
MAZZARESE, D [1 ]
CONNER, WC [1 ]
JONES, KA [1 ]
机构：
[1] SLCET EJ,ELECTR TECHNOL & DEVICES LAB,FOT MONMOUTH,NJ 07703
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1989年 / 18卷 / 01期
关键词：
D O I：
10.1007/BF02655343
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：45 / 51
页数：7
相关论文
共 15 条
  • [1] A study of parasitic reactions between NH3 and TMGa or TMAI
    Chen, CH
    Liu, H
    Steigerwald, D
    Imler, W
    Kuo, CP
    Craford, MG
    Ludowise, M
    Lester, S
    Amano, J
    JOURNAL OF ELECTRONIC MATERIALS, 1996, 25 (06) : 1004 - 1008
  • [2] Study of parasitic reactions between NH3 and TMGa or TMAl
    Hewlett-Packard Optoelectronics, Division, San Jose, United States
    J Electron Mater, 6 (1004-1008):
  • [3] STUDY OF SURFACE-REACTIONS IN ATOMIC LAYER EPITAXY OF GAAS USING TRIMETHYLGALLIUM BY REFLECTANCE DIFFERENCE SPECTROSCOPY AND MASS-SPECTROSCOPY
    MAA, BY
    DAPKUS, PD
    THIN SOLID FILMS, 1993, 225 (1-2) : 12 - 16
  • [4] REFLECTANCE-DIFFERENCE SPECTROSCOPY STUDY OF SURFACE-REACTIONS IN ATOMIC LAYER EPITAXY OF GAAS USING TRIMETHYLGALLIUM AND TERTIARYBUTYLARSINE
    MAA, BY
    DAPKUS, PD
    APPLIED PHYSICS LETTERS, 1991, 58 (20) : 2261 - 2263
  • [5] Revealing the mechanisms of NH3 adsorption and reactions in catalytic NOx reduction over Cux/CHA zeolites by in situ DRIFTS spectroscopy
    Shen, Yali
    Wang, Zhiqiang
    Ge, Shasha
    Wang, Li
    Zhan, Wangcheng
    Dai, Qiguang
    Guo, Yanglong
    Guo, Yun
    Wang, Aiyong
    APPLIED CATALYSIS B-ENVIRONMENT AND ENERGY, 2024, 353
  • [6] Mechanism study on the adsorption and reactions of NH3, NO, and O2 on the CaO surface in the SNCR deNOx process
    Fu, Shi-long
    Song, Qiang
    Yao, Qiang
    CHEMICAL ENGINEERING JOURNAL, 2016, 285 : 137 - 143
  • [7] Density functional study on the adsorption and surface reactions on SiO2 in TiN-CVD using TiCl4 and NH3
    Tanaka, T
    Nakajima, T
    Yamashita, K
    THIN SOLID FILMS, 2002, 409 (01) : 51 - 57
  • [8] Probe of NH3 and CO Adsorption on the Very Outermost Surface of a Porous TiO2 Adsorbent Using Photoluminescence Spectroscopy
    Stevanovic, Ana
    Yates, John T., Jr.
    LANGMUIR, 2012, 28 (13) : 5652 - 5659
  • [9] Study of the adsorption mechanisms of NH3, H2S and SO2 on sepiolite using molecular dynamics simulations
    Zhou, Ji
    Wang, Zuozhang
    Alcantara, Ana C. S.
    Ding, Yanhuai
    CLAY MINERALS, 2023, 58 (01) : 1 - 6
  • [10] Modeling of reaction pathways of GaN growth by metalorganic vapor-phase epitaxy using TMGa/NH3/H2 system:: A computational fluid dynamics simulation study
    Hirako, A
    Kusakabe, K
    Ohkawa, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (02): : 874 - 879
12