FIRST STEPS TOWARDS THE FABRICATION OF ELECTROSTATIC MICROMOTORS USING SOG

被引：4
|
作者：
CONEDERA, V
FABRE, N
CAMON, H
ROUSSET, B
PHAM, HH
SOLANO, C
机构：
[1] LAAS/CNRS, Toulous, 31077
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1995年 / 46卷 / 1-3期
关键词：
ELECTROSTATIC MICROMOTORS; SPIN-ON GLASS;
D O I：
10.1016/0924-4247(94)00866-G
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We have studied the use of spin-on glass (SOG), as a sacrificial layer and source of dopant, for the realization of an electrostatic micromotor. Some difficulties have been encountered, and we propose a new process based on SOG, a classical POCl3 dopant source and oxidation of polysilicon to avoid these difficulties.
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页码：82 / 84
页数：3
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