THE RANGE OF LIGHT-IONS IN POLYMERIC RESISTS

被引:17
|
作者
ADESIDA, I
KARAPIPERIS, L
机构
[1] CORNELL UNIV,SCH ELECT ENGN,ITHACA,NY 14853
[2] THOMSON CSF,CENT RECH LAB,F-91401 ORSAY,FRANCE
关键词
D O I
10.1063/1.334189
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1801 / 1807
页数:7
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