EFFECTS OF DEUTERIUM PLASMAS ON SILICON NEAR-SURFACE PROPERTIES

被引：11
|
作者：
LINDSTROM, JL
OEHRLEIN, GS
SCILLA, GJ
YAPSIR, AS
CORBETT, JW
机构：
[1] UNIV ALBANY,DEPT PHYS,ALBANY,NY 12222
[2] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
[3] RENSSELAER POLYTECH INST,CTR INTEGRATED ELECTR,TROY,NY 12180
来源：
JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 08期
关键词：
D O I：
10.1063/1.342666
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：3297 / 3300
页数：4
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